Order 66 was used after about 3 years of fighting during the Clone Wars. The primary goal was to wipe out the Jedi. When it was given, the excuse was that there were signs of a Jedi rebellion against the Republic, which was an entirely manufactured reason.
If Palpatine was just going to make up a reason, what did he gain by allowing the Clone Wars to proceed for a full 3 years? While he's a Sith, and therefore evil, and isn't going to care about lives lost, he's still losing resources, such as the clone troopers that will be able to serve him as stormtroopers.
Why did he need to wait so long before giving Order 66?
Answer
Chancellor Palpatine required a motive to execute order 66, this was instigated by the Jedi/Mace Windu's attempt to arrest/kill the chancellor.
As noted in a related question - Why did the Jedi fail to get information about Order 66?:
In the event of Jedi officers acting against the interests of the Republic, and after receiving specific orders verified as coming directly from the Supreme Commander (Chancellor), GAR [Grand Army of the Republic] commanders will remove those officers by lethal force, and command of the GAR will revert to the Supreme Commander (Chancellor) until a new command structure is established.
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